CA2218876A1 - Elastomeric micro electro mechanical systems - Google Patents

Elastomeric micro electro mechanical systems

Info

Publication number
CA2218876A1
CA2218876A1 CA2218876A CA2218876A CA2218876A1 CA 2218876 A1 CA2218876 A1 CA 2218876A1 CA 2218876 A CA2218876 A CA 2218876A CA 2218876 A CA2218876 A CA 2218876A CA 2218876 A1 CA2218876 A1 CA 2218876A1
Authority
CA
Canada
Prior art keywords
microelectrodes
macroelectrode
mechanical systems
electro mechanical
micro electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2218876A
Other languages
French (fr)
Other versions
CA2218876C (en
Inventor
Lorne A. Whitehead
Brent J. Bolleman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of British Columbia
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2218876A1 publication Critical patent/CA2218876A1/en
Application granted granted Critical
Publication of CA2218876C publication Critical patent/CA2218876C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means

Abstract

An electromechanical transducer having a substrate (4) bearing a plurality of elastomeric microstructures (5) with a microelectrode (6) on each microstructure. A power supply (11) is connected to the microelectrodes for controlled application to them of an electrical potential which alternately induces forces of attraction between adjacent pairs of microelectrodes, causing controlled, time-varying displacement of the microelectrodes.
Alternatively, a further plurality of microelectrodes (14), or one or more macroelectrodes (32), are elastomerically supported above the microelectrodes, with the power supply being connected to the macroelectrode(s) such that the electrical potential applied between the microelectrodes and macroelectrode(s) alternately induces forces of attraction between the microelectrodes and macroelectrode(s), causing controlled, time-varying displacement of the microelectrodes relative to the macroelectrode(s). The macroelectrode(s) can also be applied to a side of the substrate opposite the microstructures.
CA002218876A 1995-05-01 1996-04-26 Elastomeric micro electro mechanical systems Expired - Fee Related CA2218876C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/431,735 US5642015A (en) 1993-07-14 1995-05-01 Elastomeric micro electro mechanical systems
US08/431,735 1995-05-01
PCT/CA1996/000268 WO1996034701A1 (en) 1995-05-01 1996-04-26 Elastomeric micro electromechanical systems

Publications (2)

Publication Number Publication Date
CA2218876A1 true CA2218876A1 (en) 1996-11-07
CA2218876C CA2218876C (en) 1999-12-07

Family

ID=23713203

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002218876A Expired - Fee Related CA2218876C (en) 1995-05-01 1996-04-26 Elastomeric micro electro mechanical systems

Country Status (9)

Country Link
US (1) US5642015A (en)
EP (1) EP0824381B1 (en)
JP (1) JP3016870B2 (en)
KR (1) KR100286486B1 (en)
CN (1) CN1047107C (en)
AU (1) AU5394596A (en)
CA (1) CA2218876C (en)
DE (1) DE69609414T2 (en)
WO (1) WO1996034701A1 (en)

Families Citing this family (182)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6376971B1 (en) 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
US6545384B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer devices
US6781284B1 (en) 1997-02-07 2004-08-24 Sri International Electroactive polymer transducers and actuators
US6812624B1 (en) * 1999-07-20 2004-11-02 Sri International Electroactive polymers
US7320457B2 (en) * 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US7214298B2 (en) * 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
US6833242B2 (en) * 1997-09-23 2004-12-21 California Institute Of Technology Methods for detecting and sorting polynucleotides based on size
DE19825581A1 (en) * 1998-06-09 1999-12-16 Volkswagen Ag Ultrasonic film transformer for measuring distance to another object, e.g. a vehicle, and manufacturing process giving a transformer which can be easily adapted to different contours
US6216973B1 (en) 1998-10-23 2001-04-17 Trw Vehicle Safety Systems Inc. Electric locking seat belt retractor
US6184608B1 (en) * 1998-12-29 2001-02-06 Honeywell International Inc. Polymer microactuator array with macroscopic force and displacement
US6184607B1 (en) * 1998-12-29 2001-02-06 Honeywell International Inc. Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode
US6297069B1 (en) 1999-01-28 2001-10-02 Honeywell Inc. Method for supporting during fabrication mechanical members of semi-conductive dies, wafers, and devices and an associated intermediate device assembly
US7244396B2 (en) * 1999-04-06 2007-07-17 Uab Research Foundation Method for preparation of microarrays for screening of crystal growth conditions
US20030022383A1 (en) * 1999-04-06 2003-01-30 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7247490B2 (en) * 1999-04-06 2007-07-24 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
MXPA01009999A (en) * 1999-04-06 2003-07-14 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth.
US7250305B2 (en) * 2001-07-30 2007-07-31 Uab Research Foundation Use of dye to distinguish salt and protein crystals under microcrystallization conditions
US7214540B2 (en) * 1999-04-06 2007-05-08 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US6166478A (en) * 1999-06-04 2000-12-26 The Board Of Trustees Of The University Of Illinois Method for assembly of microelectromechanical systems using magnetic actuation
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US7244402B2 (en) * 2001-04-06 2007-07-17 California Institute Of Technology Microfluidic protein crystallography
US7459022B2 (en) * 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US6929030B2 (en) * 1999-06-28 2005-08-16 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7217321B2 (en) * 2001-04-06 2007-05-15 California Institute Of Technology Microfluidic protein crystallography techniques
US7195670B2 (en) 2000-06-27 2007-03-27 California Institute Of Technology High throughput screening of crystallization of materials
US8052792B2 (en) * 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7306672B2 (en) 2001-04-06 2007-12-11 California Institute Of Technology Microfluidic free interface diffusion techniques
US7144616B1 (en) * 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7052545B2 (en) * 2001-04-06 2006-05-30 California Institute Of Technology High throughput screening of crystallization of materials
GB2352283A (en) 1999-06-28 2001-01-24 California Inst Of Techn Microfabricated valves, pumps, mirror array and refracting structure
ATE381116T1 (en) * 1999-07-20 2007-12-15 Stanford Res Inst Int ELECTROACTIVE POLYMER GENERATORS
US6664718B2 (en) 2000-02-09 2003-12-16 Sri International Monolithic electroactive polymers
US7537197B2 (en) * 1999-07-20 2009-05-26 Sri International Electroactive polymer devices for controlling fluid flow
FR2803957B1 (en) * 2000-01-13 2002-03-08 Information Technology Dev CAPACITIVE MICRO ACTUATOR WITH OPTIMIZED DEFORMABLE STRUCTURE FOR DISK MEMORY AND MANUFACTURING METHOD
US6753638B2 (en) * 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6911764B2 (en) 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
AU2001238459A1 (en) * 2000-02-16 2001-08-27 Omlidon Technologies Llc Method for microstructuring polymer-supported materials
EP1259992B1 (en) * 2000-02-23 2011-10-05 SRI International Biologically powered electroactive polymer generators
WO2001063738A2 (en) * 2000-02-23 2001-08-30 Sri International Electroactive polymer thermal electric generators
AU2001240040A1 (en) * 2000-03-03 2001-09-17 California Institute Of Technology Combinatorial array for nucleic acid analysis
IL151914A0 (en) 2000-03-31 2003-04-10 Lifescan Inc Electrically-conductive patterns for monitoring the filling of medical devices
US8105553B2 (en) * 2004-01-25 2012-01-31 Fluidigm Corporation Crystal forming devices and systems and methods for using the same
US7867763B2 (en) 2004-01-25 2011-01-11 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US7279146B2 (en) * 2003-04-17 2007-10-09 Fluidigm Corporation Crystal growth devices and systems, and methods for using same
US20050118073A1 (en) * 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
US6628041B2 (en) * 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US7351376B1 (en) * 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
WO2002000343A2 (en) 2000-06-27 2002-01-03 Fluidigm Corporation A microfluidic design automation method and system
US7000330B2 (en) * 2002-08-21 2006-02-21 Honeywell International Inc. Method and apparatus for receiving a removable media member
JPWO2002015378A1 (en) * 2000-08-11 2004-01-15 株式会社エッチャンデス Folding type piezoelectric stator, folding type piezoelectric actuator and their applications
EP2299256A3 (en) * 2000-09-15 2012-10-10 California Institute Of Technology Microfabricated crossflow devices and methods
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
US6842964B1 (en) 2000-09-29 2005-01-18 Tucker Davis Technologies, Inc. Process of manufacturing of electrostatic speakers
US7678547B2 (en) * 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
US7258774B2 (en) * 2000-10-03 2007-08-21 California Institute Of Technology Microfluidic devices and methods of use
US7097809B2 (en) * 2000-10-03 2006-08-29 California Institute Of Technology Combinatorial synthesis system
EP1336097A4 (en) * 2000-10-13 2006-02-01 Fluidigm Corp Microfluidic device based sample injection system for analytical devices
US7548015B2 (en) * 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US7518284B2 (en) 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
WO2004027970A1 (en) * 2002-09-20 2004-04-01 Danfoss A/S An elastomer actuator and a method of making an actuator
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
DE10054247C2 (en) * 2000-11-02 2002-10-24 Danfoss As Actuator and method for its manufacture
US7232109B2 (en) * 2000-11-06 2007-06-19 California Institute Of Technology Electrostatic valves for microfluidic devices
US7378280B2 (en) * 2000-11-16 2008-05-27 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
WO2002060582A2 (en) * 2000-11-16 2002-08-08 Fluidigm Corporation Microfluidic devices for introducing and dispensing fluids from microfluidic systems
US20050196785A1 (en) * 2001-03-05 2005-09-08 California Institute Of Technology Combinational array for nucleic acid analysis
US7670429B2 (en) * 2001-04-05 2010-03-02 The California Institute Of Technology High throughput screening of crystallization of materials
US6960437B2 (en) 2001-04-06 2005-11-01 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
US6802342B2 (en) 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
US20020164816A1 (en) * 2001-04-06 2002-11-07 California Institute Of Technology Microfluidic sample separation device
US6752922B2 (en) * 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
ATE500051T1 (en) 2001-04-06 2011-03-15 Fluidigm Corp POLYMER SURFACE MODIFICATION
US7233097B2 (en) * 2001-05-22 2007-06-19 Sri International Rolled electroactive polymers
US6543087B2 (en) 2001-06-01 2003-04-08 Aip Networks, Inc. Micro-electromechanical hinged flap structure
US20050149304A1 (en) * 2001-06-27 2005-07-07 Fluidigm Corporation Object oriented microfluidic design method and system
US7075162B2 (en) * 2001-08-30 2006-07-11 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
WO2003031066A1 (en) 2001-10-11 2003-04-17 California Institute Of Technology Devices utilizing self-assembled gel and method of manufacture
US8440093B1 (en) 2001-10-26 2013-05-14 Fuidigm Corporation Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels
US7064740B2 (en) 2001-11-09 2006-06-20 Sharp Laboratories Of America, Inc. Backlit display with improved dynamic range
US7691333B2 (en) * 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
US7118910B2 (en) 2001-11-30 2006-10-10 Fluidigm Corporation Microfluidic device and methods of using same
AU2002351736A1 (en) * 2001-12-21 2003-07-15 Danfoss A/S Dielectric actuator or sensor structure and method of making it
DK1512215T3 (en) * 2002-03-18 2011-12-05 Stanford Res Inst Int Electroactive polymeric fluid movement device
US7312085B2 (en) * 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
JP2005521425A (en) 2002-04-01 2005-07-21 フルイディグム コーポレイション Microfluidic particle analysis system
US20070026528A1 (en) * 2002-05-30 2007-02-01 Delucas Lawrence J Method for screening crystallization conditions in solution crystal growth
AU2002316298A1 (en) * 2002-06-14 2003-12-31 International Business Machines Corporation Micro-electromechanical switch having a deformable elastomeric conductive element
WO2004005898A1 (en) * 2002-07-10 2004-01-15 Uab Research Foundation Method for distinguishing between biomolecule and non-biomolecule crystals
US7143785B2 (en) * 2002-09-25 2006-12-05 California Institute Of Technology Microfluidic large scale integration
US8220494B2 (en) * 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
EP1546412B1 (en) 2002-10-02 2014-05-21 California Institute Of Technology Microfluidic nucleic acid analysis
DE60328913D1 (en) * 2002-12-12 2009-10-01 Danfoss As TOUCH SENSOR ELEMENT AND SENSOR GROUP
CN101098670B (en) 2003-02-24 2011-07-27 丹福斯有限公司 Electro active elastic compression bandage
CA2521171C (en) * 2003-04-03 2013-05-28 Fluidigm Corp. Microfluidic devices and methods of using same
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
US7476363B2 (en) * 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US20050145496A1 (en) * 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
EP1636017A2 (en) 2003-05-20 2006-03-22 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
AU2004261655A1 (en) * 2003-07-28 2005-02-10 Fluidigm Corporation Image processing method and system for microfluidic devices
US7413712B2 (en) 2003-08-11 2008-08-19 California Institute Of Technology Microfluidic rotary flow reactor matrix
WO2005052673A2 (en) 2003-11-21 2005-06-09 Sharp Laboratories Of America, Inc. Liquid crystal display with adaptive color
US7164284B2 (en) * 2003-12-18 2007-01-16 Sharp Laboratories Of America, Inc. Dynamic gamma for a liquid crystal display
US7407799B2 (en) * 2004-01-16 2008-08-05 California Institute Of Technology Microfluidic chemostat
US7602369B2 (en) * 2004-05-04 2009-10-13 Sharp Laboratories Of America, Inc. Liquid crystal display with colored backlight
US7872631B2 (en) 2004-05-04 2011-01-18 Sharp Laboratories Of America, Inc. Liquid crystal display with temporal black point
US7612757B2 (en) 2004-05-04 2009-11-03 Sharp Laboratories Of America, Inc. Liquid crystal display with modulated black point
US7505018B2 (en) 2004-05-04 2009-03-17 Sharp Laboratories Of America, Inc. Liquid crystal display with reduced black level insertion
US7777714B2 (en) 2004-05-04 2010-08-17 Sharp Laboratories Of America, Inc. Liquid crystal display with adaptive width
US8395577B2 (en) 2004-05-04 2013-03-12 Sharp Laboratories Of America, Inc. Liquid crystal display with illumination control
US7532192B2 (en) 2004-05-04 2009-05-12 Sharp Laboratories Of America, Inc. Liquid crystal display with filtered black point
US20060024751A1 (en) * 2004-06-03 2006-02-02 Fluidigm Corporation Scale-up methods and systems for performing the same
US7023451B2 (en) * 2004-06-14 2006-04-04 Sharp Laboratories Of America, Inc. System for reducing crosstalk
US7116463B2 (en) * 2004-07-15 2006-10-03 Optron Systems, Inc. High angular deflection micro-mirror system
US7898519B2 (en) 2005-02-17 2011-03-01 Sharp Laboratories Of America, Inc. Method for overdriving a backlit display
US8050511B2 (en) 2004-11-16 2011-11-01 Sharp Laboratories Of America, Inc. High dynamic range images from low dynamic range images
US7525528B2 (en) 2004-11-16 2009-04-28 Sharp Laboratories Of America, Inc. Technique that preserves specular highlights
US8050512B2 (en) 2004-11-16 2011-11-01 Sharp Laboratories Of America, Inc. High dynamic range images from low dynamic range images
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US8121401B2 (en) 2006-01-24 2012-02-21 Sharp Labortories of America, Inc. Method for reducing enhancement of artifacts and noise in image color enhancement
US9143657B2 (en) 2006-01-24 2015-09-22 Sharp Laboratories Of America, Inc. Color enhancement technique using skin color detection
US7815868B1 (en) * 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US7880371B2 (en) 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7732999B2 (en) * 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US8941580B2 (en) 2006-11-30 2015-01-27 Sharp Laboratories Of America, Inc. Liquid crystal display with area adaptive backlight
EP1970122A1 (en) * 2007-03-12 2008-09-17 Koninklijke Philips Electronics N.V. Microfluidic system based on magnetic actuator elements
KR20100053536A (en) 2007-06-29 2010-05-20 아트피셜 머슬, 인코퍼레이션 Electroactive polymer transducers for sensory feedback applications
US20110189027A1 (en) * 2008-04-30 2011-08-04 Morten Kjaer Hansen Pump powered by a polymer transducer
US20110186759A1 (en) * 2008-04-30 2011-08-04 Danfoss Polypower A/S Power actuated valve
US8591206B2 (en) * 2008-12-06 2013-11-26 Thomas R. Krenik Air cycle heat pump techniques and system
EP2239793A1 (en) 2009-04-11 2010-10-13 Bayer MaterialScience AG Electrically switchable polymer film structure and use thereof
US8712559B2 (en) * 2010-02-10 2014-04-29 The Board Of Trustees Of The University Of Illionois Adaptive control for uncertain nonlinear multi-input multi-output systems
JP5548563B2 (en) * 2010-09-14 2014-07-16 ヤマハ株式会社 Nanosheet transducer
KR20140008416A (en) 2011-03-01 2014-01-21 바이엘 인텔렉쳐 프로퍼티 게엠베하 Automated manufacturing processes for producing deformable polymer devices and films
TW201250288A (en) 2011-03-22 2012-12-16 Bayer Materialscience Ag Electroactive polymer actuator lenticular system
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
KR20150031285A (en) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 Stretch frame for stretching process
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
WO2014117724A1 (en) * 2013-01-29 2014-08-07 中国科学院苏州纳米技术与纳米仿生研究所 Electronic skin, preparation method and use thereof
EP2868970B1 (en) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regulating device
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US9899937B2 (en) * 2015-01-16 2018-02-20 Wisconsin Alumni Research Foundation Peg-style electrostatic rotating machine
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
WO2020097730A1 (en) * 2018-11-16 2020-05-22 The University Of British Columbia Deformable sensor for simulating skin and other applications
US11713240B2 (en) * 2019-12-09 2023-08-01 Board Of Regents, The University Of Texas System Cellular array electrostatic actuator

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3772537A (en) * 1972-10-27 1973-11-13 Trw Inc Electrostatically actuated device
US4376302A (en) * 1978-04-13 1983-03-08 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric polymer hydrophone
US4654546A (en) * 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
CA1277415C (en) * 1986-04-11 1990-12-04 Lorne A. Whitehead Elastomer membrane enhanced electrostatic transducer
US4887248A (en) * 1988-07-07 1989-12-12 Cleveland Machine Controls, Inc. Electrostatic transducer and method of making and using same
JP2797146B2 (en) * 1990-10-09 1998-09-17 株式会社ゼクセル Electromagnetic actuator for moving objects
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
US5485437A (en) * 1993-02-05 1996-01-16 Discovision Associates Shock-resistant, electrostatically actuated pick-up for optical recording and playback
US5450498A (en) * 1993-07-14 1995-09-12 The University Of British Columbia High pressure low impedance electrostatic transducer
US5359574A (en) * 1993-08-27 1994-10-25 The United States Of America As Represented By The Secretary Of The Navy Electromagnetically activated compliant wavy-wall
US5395592A (en) * 1993-10-04 1995-03-07 Bolleman; Brent Acoustic liquid processing device

Also Published As

Publication number Publication date
DE69609414D1 (en) 2000-08-24
AU5394596A (en) 1996-11-21
KR100286486B1 (en) 2001-04-16
KR19990008212A (en) 1999-01-25
JPH10511528A (en) 1998-11-04
MX9708359A (en) 1998-06-30
WO1996034701A1 (en) 1996-11-07
US5642015A (en) 1997-06-24
DE69609414T2 (en) 2001-03-08
JP3016870B2 (en) 2000-03-06
EP0824381A1 (en) 1998-02-25
CA2218876C (en) 1999-12-07
CN1047107C (en) 1999-12-08
EP0824381B1 (en) 2000-07-19
CN1186458A (en) 1998-07-01

Similar Documents

Publication Publication Date Title
CA2218876A1 (en) Elastomeric micro electro mechanical systems
WO2003097702A3 (en) Adhesive microstructure and method of forming same
EP0883191A3 (en) Electroluminescence device, electroluminescence apparatus, and production methods thereof
WO2001023105A8 (en) An array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
EP0744821A3 (en) Electrostatic actuator with different electrode spacing
ATE422248T1 (en) PAPER WHITE BISTABLE DIRECT VIEW DISPLAY DEVICE
DE69739101D1 (en) MICRO DRIVE MOUNTING FOR IMPLANTED HEARING AID
AU5707796A (en) An actuator motor and a method for fabrication of such an actuator
WO1989012830A3 (en) Micro-machined accelerometer
WO1999026333A3 (en) Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
EP0773436A3 (en) Suspended microstructures
CA2185414A1 (en) Amphibious craft
DE69517652D1 (en) Anisotropic conductor layer for micro connections
EP1069450A3 (en) Optical element and optical device having it
CA2251732A1 (en) Flexible cable management system
EP1031734A3 (en) Assembly of etched sheets forming a fluidic module
EP1089349A3 (en) Piezoelectric/electrostrictive device and method of manufacturing same
DE69616706T2 (en) Piezoresistive force balancing accelerometer
EP1408561A3 (en) Less-dust-generative piezoelectric/electrostrictive device and manufacturing method
EP0795906A3 (en) An electronic-circuit assembly and its manufacturing method
BR0008668A (en) Acoustic sensor system, acoustic sensor element for use in the system, processes to manufacture an acoustic sensor system, to detect acoustic wave signals to identify the condition of a patient's coronary arteries, to form an acoustic sensor, to minimize mechanical or electrical interference between one or more adjacent sensors or unwanted system or environmental mechanical input in an acoustic sensor system and to arrange a sensor system in an individual
WO2005046206A3 (en) Electromechanical micromirror devices and methods of manufacturing the same
AU5462999A (en) Flexible fluidic force generator
EP0262829A1 (en) Electrostatic display module
EP1139450A4 (en) Piezoelectric / electrostrictive device

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed